Investigation of Pt(II) precursors for electron beam-induced deposition of Pt nanostructures

Hang Lu¹, Julie A. Spencer², Filipe Ferreira da Silva⁴, Oddur Ingólfsson³, Howard Fairbrother², Lisa McElwee-White¹

1. Department of Chemistry, University of Florida, Gainesville, FL, United States.
2. Johns Hopkins University, Baltimore, MD, United States.
3. Department of Chemistry, University of Iceland, Reykjavik, Iceland.
4. Departamento de Física, Universidade NOVA de Lisboa, Caparica, Portugal.

To enable the electron beam-induced deposition (EBID) of Pt nanostructures, Pt(II) precursors have been designed and synthesized specifically for EBID.  The electron-induced reactions of those precursors have been investigated under ultrahigh vacuum (UHV) surface science conditions and gas phase electron-molecule interactions have also been studied.  Compared with traditional commercially available Pt precursors, cis-Pt(CO)₂Cl₂ has been found to produce high metal content deposits upon loss of both CO and Cl ligands.  These results inform the design of additional EBID precursors.