Design and Synthesis of Precursors for Electron Beam Induced Deposition

Scott Matsuda,^† Kelsea Johnson,^† Julie Spencer,^‡ Ilyas Unlu,^‡ Rachel Thorman,^§ D. Howard Fairbrother,^‡ Oddur Ingólfsson^§ and Lisa McElwee-White^†*

†Department of Chemistry, University of Florida, Gainesville, FL 32611-7200
‡Department of Chemistry, Johns Hopkins University, Baltimore, MD 21218-2683
§Department of Chemistry, University of Iceland, Reykjavík, Iceland

Electron beam induced deposition (EBID) is used for mask repair and circuit edit in the manufacturing of integrated circuits. We are synthesizing bimetallic precursors, such as (ƞ⁵-Cp)Fe(CO)₂M(CO)₅ (M = Mn, Re), which can be used to deposit alloyed nanostructures onto a substrate via EBID. Associated gas phase electron attachment and surface science studies are being used to assess these bimetallic precursor candidates for this technique.