Name | Mr. Scott Matsuda |
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Organization or Institution | University of Florida |
Presentation Type | Poster |
Topic | Inorganic Chemistry |
Title | Design and Synthesis of Precursors for Electron Beam Induced Deposition |
Author(s) | Scott Matsuda,† Kelsea Johnson,† Julie Spencer,‡ Ilyas Unlu,‡ Rachel Thorman,§ D. Howard Fairbrother,‡ Oddur Ingólfsson§ and Lisa McElwee-White†* |
Author Institution(s) | †Department of Chemistry, University of Florida, Gainesville, FL 32611-7200 |
Abstract | Electron beam induced deposition (EBID) is used for mask repair and circuit edit in the manufacturing of integrated circuits. We are synthesizing bimetallic precursors, such as (ƞ5-Cp)Fe(CO)2M(CO)5 (M = Mn, Re), which can be used to deposit alloyed nanostructures onto a substrate via EBID. Associated gas phase electron attachment and surface science studies are being used to assess these bimetallic precursor candidates for this technique. |