|Name||Mr. Scott Matsuda|
|Organization or Institution||University of Florida|
Design and Synthesis of Precursors for Electron Beam Induced Deposition
Scott Matsuda,† Kelsea Johnson,† Julie Spencer,‡ Ilyas Unlu,‡ Rachel Thorman,§ D. Howard Fairbrother,‡ Oddur Ingólfsson§ and Lisa McElwee-White†*
†Department of Chemistry, University of Florida, Gainesville, FL 32611-7200
Electron beam induced deposition (EBID) is used for mask repair and circuit edit in the manufacturing of integrated circuits. We are synthesizing bimetallic precursors, such as (ƞ5-Cp)Fe(CO)2M(CO)5 (M = Mn, Re), which can be used to deposit alloyed nanostructures onto a substrate via EBID. Associated gas phase electron attachment and surface science studies are being used to assess these bimetallic precursor candidates for this technique.